Synthesis and Characterization of a High‐Purity AlN Powder

Abstract

High‐purity AIN powder was synthesized by preparing high‐purity (NH 4 ) 3 AIF 6 , decomposing the (NH 4 ) 3 AIF 6 to AIF 3 , and reacting the AIF, at 800° to 1000°C with high‐purity NH 3 . AIN powders could be synthesized with a cation purity of 99.99% and an oxygen content <0.2 wt%. The specific surface area depended on the process conditions and varied from 0.2 to 2.6 m 2 /g. The thermodynamics of the process are evaluated and the influence of various process parameters on the resulting powder characteristics are described.