Concepedia

Effects produced by ion bombardment and implantation into thin films and surfaces

Laurie Collins, Paul A. O’Connell, J.G. Perkins, Françoise Pontet, P.T. Stroud

Nuclear Instruments and Methods · 1971 · 23 citations · 7 references

DOI

Concepts

References

7

Vacuum Deposition of Thin Films

L. Holland, Joseph Greenspan · Journal of The Electrochemical Society · 1957 · 861 citations

, , +11

Electronic properties of amorphous dielectric films

A.K. Jonscher · Thin Solid Films · 1967 · 454 citations

, , +12

Formation of SiO<sub>2</sub> Films by Oxygen-Ion Bombardment

Atsutomo Tooi · Japanese Journal of Applied Physics · 1966 · 103 citations

, , +12

The theory of recoil implantation

R.S. Nelson · Radiation Effects · 1969 · 69 citations

, , +7

Effect of ion bombardment on the adhesion of aluminium films on glass

Laurie Collins, J.G. Perkins, P.T. Stroud · Thin Solid Films · 1969 · 60 citations

, , +13