Effects of Thickness on Piezoelectric Properties of Highly Oriented Lead Zirconate Titanate Films

Abstract

Lead zirconate titanate (PZT) films were deposited on platinized silicon substrates by spin coating using PZT sols containing polyvinylpyrrolidone (PVP) as an additive. PZT films with a 60/40 composition and a thickness of up to 8 μm were fabricated by repeating the deposition process 15 times on highly oriented (100) and (111) seed layers with the same composition. The films grew well in the direction of the seed layers and had a uniform and smooth surface without any cracks. As the thickness of the films increased, the grain size remained almost the same, but the effective d 33 value increased steadily. The thickness dependence of the piezoelectric properties was attributed to the residual stress of the films.