Controlling the electron energy distribution function of electron beam generated plasmas with molecular gas concentration: I. Experimental results

Abstract

This paper, the first in a series of two, presents experimental results demonstrating the control of electron and ion energy distribution functions in electron beam generated processing plasmas by adding trace concentrations of N2 to an Ar background. Measurements of the electron energy distribution function, f0(E), are performed using a Langmuir probe while measurements of the Ar ion energy distribution function are performed using an energy-resolved mass spectrometer. The experimental results agree with modeling results, described in part II of this work, which indicate that inelastic electron collisions with nitrogen molecules provide an energy sink that can be exploited to control the electron energy distribution function.