New calibration method for the determination of the absolute density of CH radicals through laser-induced fluorescence

Abstract

Laser-induced fluorescence (LIF) was applied at the B-X transition of the CH radical to measure the absolute densities of CH radicals in an electron-cyclotron resonance methane plasma. The absolute experimental uncertainty is only approximately 30% as a result of a new calibration procedure. The experimental setup was calibrated through the comparison of the LIF signal of N(2)(+) with that of CH. The absolute N(2)(+) density was derived from the spatially resolved N(2)(+) LIF signal and the line-averaged electron density as measured with microwave interferometry.