Preparation of Li ₂ B ₄ O ₇ Films with Preferential Orientation by Sol–Gel Method

Abstract

Li 2 B 4 O 7 films, a promising material for surface acoustic wave devices, were prepared by the sol—gel method using metal alkoxide precursors as starting materials. The Li 2 B 4 O 7 films on silicon (100) and (111) single crystals prepared from a coating solution to which acetic or hydrochloric acid was added were highly oriented along the (122) plane, whereas those without acid additive were randomly oriented. The results were interpreted based on the basic sol‐gel chemistry and the lattice matching between the film and substrate.