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Flexible technological process for functional integration
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2002
Year
Unknown Venue
EngineeringDevice IntegrationFlexible Manufacturing TechnologyElectronic DesignFunctional Integration ModePower ElectronicsSocial SciencesSystem IntegrationInterconnect (Integrated Circuits)Business IntegrationElectronic PackagingTechnology TransferElectrical EngineeringDesignFlexible ManufacturingMicroelectronicsTechnological ProcessIndustrial DesignIntegrated DesignPower DeviceBasic Technological StepsFlexible Technological ProcessTechnology
In this paper, a flexible technological process suitable for the development of complex integrated power structures based on the functional integration mode is presented. This technological process is based on a succession of basic technological steps corresponding to the fabrication of IGBT devices and compatible specific steps supporting more complex functions.