Publication | Closed Access
Run by run process control
13
Citations
0
References
2002
Year
Unknown Venue
EngineeringRun Process ControlControl SystemsProcess AutomationSystems EngineeringProcess MeasurementControl AlgorithmsRun ControllerControl MethodProcess MonitoringComputer EngineeringProcess Systems EngineeringRuntime SystemVlsi ProcessingStatistical Process ControlControl System EngineeringProgram AnalysisProduct RunAutomationProcess ControlBusinessIndustrial Process Control
Summary form only given. The authors present an approach to process control in VLSI processing where the recipe is modified between every product run, based on measured results, in order to compensate for small drifts and shifts. This approach is implemented in the run-by-run controller, which is part of a process control system being developed at MIT. The run-by-run controller implements a form of adaptive control based on the sequential design of experiments. The algorithmic basis of the run controller is discussed with attention to the implementation of statistical process control (SPC) charting concurrent with run-by-run control. Examples of applications are presented.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>