Publication | Closed Access
Study of the influence of oxygen on the composition of thin films obtained by r.f. sputtering from a Ca5(PO4)3 OH target
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Citations
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References
1997
Year
Materials ScienceEngineeringOh TargetOxide ElectronicsSurface ScienceApplied PhysicsVacuum DeviceThin FilmsChemical DepositionThin Film Processing
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