Thin-film Lithium Niobate contour-mode resonators

Abstract

This paper presents Lithium Niobate (LN) thin-film contour mode resonators (CMR) on a piezoelectric-onpiezoelectric platform. Using this platform, we demonstrate, on a black Y136 cut Lithium Niobate thin-film, one-port high-order width extensional contour mode resonators at 463MHz and 750MHz. The electro-mechanical coupling factor (k <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">t</sub> <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ) and quality factor (Q) of the 750 MHz resonator is 8.6% and 612, resulting in a k <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">t</sub> <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> *Q of 53. The 463MHz resonator exhibits a k <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">t</sub> <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> *Q of 105, with a 7% k <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">t</sub> <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> and 1500 Q. With this technology, we can potentially achieve multi-frequency band-pass filters with both wide bandwidth and steep roll-off.