CMOS Single-Photon Avalanche Diode Array for Time-Resolved Fluorescence Detection

Abstract

A single photon avalanche diode detector for the analysis of fluorescence phenomena is presented. The 14-pixels array, fabricated in a conventional high voltage 0.35-mum CMOS technology, allows measuring photon densities as low as 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">8</sup> photons/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> s. Each 180times150-mum <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> pixel integrates a single photon avalanche diode combined with an active quenching circuit and a 17-bit digital events counter. On chip master logic provides the digital control phases required by the pixel array with a full programmability of the main timing synchronisms. Time-resolved measurements has been demonstrated by detecting a 10ns, 10pW (peak-power on the pixel) light pulse with a typical resolution of 80ps