IEEE Photonics Technology Letters · 1993 · 17 citations · 13 references
EngineeringElectrical EngineeringMaterials ScienceOptoelectronicsPhotonicsSemiconductor DevicesIntegrated OpticsIntegrated PhotonicsPhotodetectorsPhotonic Integrated CircuitsSemiconductor HeterostructuresWaveguidesBandwidthDouble HeterostructuresHeterostructure PhotodetectorsIntegrated WaveguidesPhotodetector CouplingTotal Internal ReflectionWaveguide CouplingWaveguide Integration
A novel technique utilizing an etched total-internal-reflection mirror for vertical waveguide-to-photodetector coupling is described. An 83% quantum efficiency and 5-GHz bandwidth are achieved at lambda =0.84 mu in a GaAs MSM photodetector illuminated by a low-loss (0.5 dB/cm) AlGaAs double-heterostructure (DH) waveguide. A significant advantage of total-internal-reflection coupling is its compatibility with the integration of low-loss active DH waveguide components without requiring epitaxial regrowth. This coupling technique is independent of both optical wavelength and polarization, and permits efficient waveguide coupling to extremely small-area photodetectors.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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Waveguide-integrated pin photodiode on InP
C. Bornholdt, W. Döldissen, Fritz Fiedler et al. · Electronics Letters · 1987 · 60 citations
Monolithic integrated waveguide photodetector
S. Chandrasekhar, Joe C. Campbell, A.G. Dentai et al. · Electronics Letters · 1987 · 44 citations