Advanced Functional Materials · 2005 · 21 citations · 24 references
Natural SciencesMaterials EngineeringMaterials ScienceMetallic MaterialsNanomaterialsThin FilmsMetal FabricationMetalsNanoporous MaterialsCopper DepositionElectroless DepositionPore Size ControlPore Size OptimizationPore Size RegulationSilicon Wafer Processing
Abstract Two‐dimensionally ordered copper grid patterns with different pore sizes and thickness have been fabricated via electroless copper deposition using a colloidal‐crystal film as the template. The pore size of the grid can be adjusted by altering the deposition time. The copper films, with thicknesses of ≈ 100–130 nm and pore sizes of ≈ 100 nm, are flexible and can be peeled off a silicon wafer and rolled up into a reel. Three‐dimensionally ordered porous copper materials have also been prepared using a similar method.
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Natural Sciences, Materials Engineering, Materials Science +17