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Surface tension studies of (Si, N)-containing diamond-like carbon films deposited by hexamethyldisilazane

Materials ScienceDiamond-like Carbon FilmsSurface CharacterizationDiamond-like CarbonEngineeringCarbon-based MaterialSurface AnalysisSurface ScienceApplied PhysicsChemistryCarbon-based FilmsChemical Vapor DepositionSurface Tension Studies