RF discharge modeling considering time dependence and spatial nonlocality of the electron energy spectrum

Abstract

RF discharge modeling in He is performed. New features of modeling are based on the solution of the nonstationary Boltzmann equation in the spatially nonuniform electric field, coupled with the equation for electric field and charged-particle densities. It is shown that the local equilibrium model for the electron energy spectrum in RF discharge is not valid for the pressure range approximately=10 torr.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>