Empirical equations for the principal refractive indices and column angle of obliquely deposited films of tantalum oxide, titanium oxide, and zirconium oxide

Abstract

Values of the transmittance T(s) and the phaseretardation D were recorded in situ at two angles duringthe growth of thin films of tantalum oxide, titanium oxide, andzirconium oxide for deposition angles theta(nu) in the range40 degrees -70 degrees . Column angles for the same films were determinedex situ from scanning electron microscopy photographs ofdeposition-plane fractures. We show that the experimental columnangles are smaller than the corresponding values predicted by thetangent-rule equation psi = tan(-1)(0.5 tan theta(nu)) and that the experimental values fit a modifiedform of the equation psi = tan(-1)(E(1) tan theta(nu)) where E(1) is less than 0.5. We also show that theprincipal refractive indices are represented well by quadraticfunctions of the deposition angle, for example, n(1)(theta(nu)) = A(0) + A(2) theta(nu)(2).