Stereolithography of SiOC Ceramic Microcomponents

Abstract

The first example of the fabrication of complex 3D polymer-derived-ceramic structures is presented with micrometer-scale features by a 3D additive manufacturing (AM) technology, starting with a photosensitive preceramic precursor. Dense and crack-free silicon-oxycarbide-based microparts with features down to 200 μm are obtained after pyrolysis at 1000 °C in a nitrogen atmosphere.