50.2: High Reliable In‐Ga‐Zn‐Oxide FET Based Electronic Global Shutter Sensors for In‐Cell Optical Touch Screens and Image Sensors

Abstract

Abstract A 6 inch XGA LCD touch screen with optical sensors in its pixels, using oxide semiconductor (OS) FETs has been developed. The extremely low off‐state current of the OS FET facilitates the use of a global shutter and leads to an improved accuracy of touch detection. The possibility of a novel application of a touch screen and an image sensor that is an application of the combination of OS FETs and global shutter is proposed.