Ellipsoidal capillary as condenser for the BESSY full-field x-ray microscope

Abstract

The BESSY x-ray microscopy group has developed a new full-field x-ray microscope which employs an advanced x-ray optical concept. Traditionally, zone plate based condensers are used in x-ray microscopes providing an energy resolution of only E/ΔE ≤ 500. In addition, this conventional monochromator concept requires a pinhole close to the sample restricting the available space for tomography applications. In our new BESSY microscope, a standard monochromator beam line provides a high energy resolution of up to 10,000 which permits NEXAFS studies. An elliptically shaped mono-capillary is used to form the hollow cone illumination necessary for sample illumination and to match the aperture of the objective. Calculations regarding the performance and accuracies needed are presented and characterizations of capillaries especially made for the BESSY soft x-ray microscope are shown. For the first time, we demonstrate that glass capillaries are well suited as condensers in the soft x-ray energy domain. Their focusing efficiency was measured to be 80% which is about an order of magnitude higher than the diffraction efficiency of zone plate based condensers.