Ultra low loss transmission lines on low resistivity silicon substrate

Abstract

The properties of transmission lines on low-resistivity silicon substrate (/spl rho/=10 /spl Omega/.cm) are investigated. Coplanar lines on silicon substrate with a 10 /spl mu/m dielectric film show that losses of 0.6 dB/mm can be obtained at 50 GHz. A new embedded ultra-low loss coplanar line is proposed, with a broad interval of characteristic impedance.