Parylene-HT-based electret rotor generator

Abstract

A new micro power generator with parylene HT electret rotor is made. This generator uses parylene HT as a new electret material with a much superior charge density compared to teflon and CYTOP. The highest surface potential observed is 204.58 V/μm, equivalent to a surface charge density of 3.69 mC/m <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> . The generator uses an electret rotor. The rotor is a piece of PEEK insulator block coated with a layer of corona-charged parylene HT. Both output electrodes are on the stator. The generator produces 17.98μW with 80MΩ load at 50Hz and 7.77μW with an 800MΩ load at 10Hz.