11E-0 Improve MBVD Model to Consider Frequency Dependent Loss for BAW Filter Design

Abstract

With today's Bulk Acoustic Wave (BAW) technology, the BAW resonator has always some undesired modes such as lateral mode and gasket (border edge overlap) mode. The existing modified Butterworth-Van-Dyke (MBVD) model cannot model the loss due to these spurious modes, which results in the failure of predicting filter passband slope distortion. This paper has expanded the current MBVD model to overcome this limitation by modifying its parameters to be frequency dependent. It also discusses how the new frequency dependent MBVD model has been made to be scalable to resonator sizes, thus enabling its use for filter design and optimization.