The effect of nitrogen pressure on the two-step method deposition of GaN films - Concepedia

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The effect of nitrogen pressure on the two-step method deposition of GaN films

19

Citations

10

References

2006

Year

M. Liu, Baoyuan Man, Chen Xue, Hui Zhuang, Hongtong Zhu, Xiaofeng Wei, C.S. Chen

Applied Physics A

Materials ScienceMaterials EngineeringElectrical EngineeringWide-bandgap SemiconductorEngineeringTwo-step Method DepositionSurface ScienceApplied PhysicsAluminum Gallium NitrideGan Power DeviceCategoryiii-v SemiconductorGan FilmsNitrogen Pressure

References

	Year	Citations

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