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Measurement of Thin Film Parameters with a Prism Coupler
951
Citations
10
References
1973
Year
EngineeringMeasurementOptical TestingEducationOptical PropertiesGuided-wave OpticInstrumentationLight-guiding Thin FilmThin Film ProcessingPlanar Waveguide SensorPhotonicsPhysicsOphthalmologyIntegrated OpticsOptical ComponentsOptical TolerancingPrism CouplerApplied PhysicsThin FilmsOptoelectronicsDiffractive Optic
The prism coupler, known from experiments on integrated optics, can be used to determine the refractive index and the thickness of a light-guiding thin film. Both parameters are obtained simultaneously and with good accuracy by measuring the coupling angles at the prism and fitting them by a theoretical dispersion curve. The fundamentals and limitations. of this method are discussed, its practical use, and mathematical procedures for the evaluation.
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