Application of three-dimensional dislocation dynamics simulation to the STI semiconductor structure - Concepedia

Concepedia

Publication | Closed Access

Application of three-dimensional dislocation dynamics simulation to the STI semiconductor structure

17

Citations

21

References

2005

Year

Satoshi IZUMI, T. Miyake, S. Sakai, Hiroyuki Ohta

Materials Science and Engineering A

EngineeringDislocation InteractionPhysicsMaterial SimulationNumerical SimulationApplied PhysicsMaterial ModelingSolid MechanicsDefect FormationMicroelectronicsMechanics Of MaterialsSti Semiconductor Structure

References

	Year	Citations

Page 1