Micro and Nano Systems Letters · 2015 · 37 citations · 15 references
AeroacousticsSurface Acoustic WavesVibrationsSurface Acoustic WaveEngineeringAerospace EngineeringMechanical EngineeringMechatronicsGyroscopeTransducer PrincipleMicromachined Ultrasonic TransducerAcoustic SensorInstrumentationUltrasoundControl TechnologiesMulti-axis Detectable Saw
Abstract This review gives an overview of the development of surface acoustic wave (SAW) based gyroscopes. Different types of SAW based gyroscope are first presented, which are categorized into standing-wave based or progressive-wave based gyroscopes according to their respective mechanisms. In addition, multi-axis detectable SAW based gyroscopes are also introduced in this review. Different principles, structures, production methods, and control technologies are analyzed.
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The development of micro-gyroscope technology
Kai Liu, Weiping Zhang, Wenyuan Chen et al. · Journal of Micromechanics and Microengineering · 2009 · 216 citations
A surface-acoustic-wave gyro sensor
Minoru Kurosawa, Yoshimitsu Fukuda, Masaya TAKASAKI et al. · Sensors and Actuators A Physical · 1998 · 81 citations
Design and development of a MEMS-IDT gyroscope
Vijay K. Varadan, William D. Suh, Pascal B. Xavier et al. · Smart Materials and Structures · 2000 · 68 citations
Other Mems Gyroscopes, Engineering, Mechanical Engineering +24