Measurement and control of the thickness of thin films

The Ellipsometer, an Apparatus to Measure Thicknesses of Thin Surface Films

Alexandre Rothen · Review of Scientific Instruments · 1945 · 238 citations

Natural Sciences, Materials Science, Metrology +13

Multiple-beam interferometry

S. Tolansky · Vacuum · 1951 · 214 citations

Natural Sciences, Physics, Optics +6

Multiple-Beam Interferometry

Journal of the Optical Society of America · 1951 · 86 citations

Natural Sciences, Physics, Optics +6

The Thickness Measurement of Thin Films by Multiple Beam Interferometry

G. D. Scott, T. A. McLauchlan, R. S. Sennett · Journal of Applied Physics · 1950 · 78 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +10

Polarimetric Methods for the Determination of the Refractive Index and the Thickness of Thin Films on Glass

Antonín Vašíček · Journal of the Optical Society of America · 1947 · 59 citations

Natural Sciences, Materials Science, Physics +16