Vanadium Oxide Sensing Layer Grown on Carbon Nanotubes by a New Atomic Layer Deposition Process

Abstract

A new atomic layer deposition (ALD) process was applied for the homogeneous coating of carbon nanotubes with vanadium oxide. It permits the coating of the inner and outer surface with a highly conformal film of controllable thickness and, hence, the production of high surface area hybrid materials at a so far unprecedented quality. The ALD-coated tubes are used as active component in gas-sensing devices. They show electric responses that are directly related to the peculiar structure, i.e., the p-n heterojunction formed between the support and the film.