<title>Super-compact dual-axis optical scanning unit applying a tortional spring resonator driven by a piezoelectric actuator</title>

Abstract

A novel super compact dual axis optical scanner composed of a miniature resonator driven by a piezoelectric actuator and a micro-collimated light source using a micro Fresnel lens has been developed. The scanner is able to scan an optical beam in two directions with a scanning angle of more than 20 degrees, and its dimensions are 30 mm X 20 mm X 20 mm.