Liquid-jet target for laser-plasma soft x-ray generation

Abstract

We describe a new liquid-target system for low-debris laser-plasma soft x-ray sources. The system is based on a microscopic liquid jet and is experimentally evaluated for 0.7–1 keV proximity lithography and water-window x-ray microscopy applications. Compared to an existing liquid-droplet target, this target system has the same low debris emission, high x-ray photon flux, and narrow spectral bandwidth. The advantages of the liquid-jet target include improved x-ray flux stability, increased range of suitable target liquids, and elimination of the need for temporal synchronization, thereby allowing less complex laser systems to be used.