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Optimized surface passivation of n and p type silicon wafers using hydrogenated SiNx layers

Electrical EngineeringWafer Scale ProcessingEngineeringNanoelectronicsSurface ScienceApplied PhysicsSurface PassivationSemiconductor Device FabricationHydrogenated Sinx LayersElectronic PackagingSilicon On InsulatorMicroelectronicsSemiconductor Device