Publication | Closed Access
Microstructural evolution upon annealing in Ar-implanted Si
11
Citations
20
References
2011
Year
Materials ScienceEngineeringAr-implanted SiApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorEpitaxial GrowthMicrostructure
| Year | Citations | |
|---|---|---|
Page 1
Page 1