Publication | Closed Access

Self-assembly of octadecyltrichlorosilane monolayers on silicon-based substrates by chemical vapor deposition

Materials ScienceEngineeringSurface ChemistryNatural SciencesMolecular Self-assemblySurface ScienceSelf-assemblySilicon-based SubstratesOctadecyltrichlorosilane MonolayersChemistryChemical Vapor Deposition