Modification of electrical conductivity in RF magnetron sputtered ZnO films by low-energy hydrogen ion implantation - Concepedia

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Modification of electrical conductivity in RF magnetron sputtered ZnO films by low-energy hydrogen ion implantation

65

Citations

18

References

2005

Year

J. Kennedy, A. Markwitz, Z. Li, Wei Gao, C. E. Kendrick, S. M. Durbin, Roger J. Reeves

Current Applied Physics

Materials ScienceMagnetismElectrical EngineeringEngineeringOxide ElectronicsApplied PhysicsRf MagnetronElectrical ConductivitySemiconductor MaterialThin FilmsMicroelectronicsZno FilmsThin Film ProcessingMagnetoresistanceElectrical Insulation

References

	Year	Citations

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