A pulsed inductively coupled plasma source for plasma-based ion implantation - Concepedia

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A pulsed inductively coupled plasma source for plasma-based ion implantation

35

Citations

8

References

1997

Year

M. Tuszewski, J.T. Scheuer, R.A. Adler

Surface and Coatings Technology

Ion ImplantationElectrophysiologyBiomedical EngineeringNonthermal PlasmaPlasma ApplicationPlasma-based Ion Implantation

References

	Year	Citations

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