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Grazing incidence X-ray study of Ge-nanoparticle formation in (Ge:SiO2)/SiO2 multilayers

Materials ScienceIncidence X-ray StudyEngineeringNanomaterialsNanotechnologyOxide ElectronicsSurface ScienceApplied PhysicsNanoscale ScienceChemical Vapor DepositionSilicon On Insulator