Optical Nanoscale Patterning Through Surface‐Textured Polymer Films

Abstract

Controllable nanoscale patterning of a photoresist is achieved via flood UV illumination with the assistance of conformably attached surface-textured polymer films. These polymer films can be reused numerous times, enabling the cost-effective and reliable fabrication of highly ordered nanopatterned arrays for widespread applications, from plasmonic sensors and multifunctional coatings to photovoltaics.