Publication | Closed Access
Oriented growth of large size calcium fluoride single crystals for optical lithography
23
Citations
7
References
2005
Year
Materials SciencePhotonicsOptical MaterialsEngineeringElectron-beam LithographyBeam LithographyMicroscopyOptical PropertiesCrystal Growth TechnologyApplied PhysicsOptical LithographyCrystallographyNanolithography MethodDiffractive Optic
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