Electroless deposition and electrical resistivity of sub-100nm Cu films on SAMs: State of the art - Concepedia

Concepedia

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Electroless deposition and electrical resistivity of sub-100nm Cu films on SAMs: State of the art

37

Citations

13

References

2007

Year

Evgeny E. Glickman, Alexandra Inberg, Nick Fishelson, Yossi Shaham-Diamand

Microelectronic Engineering

Materials ScienceElectrical EngineeringEngineeringElectroless DepositionSpecific ResistanceNanoelectronicsSub-100nm Cu FilmsSurface ScienceApplied PhysicsThin FilmsChemical DepositionMicroelectronicsElectrical ResistivityThin Film ProcessingElectrical Insulation

References

	Year	Citations

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