Nanoindentation of Ni–Ti Thin Films

Abstract

Ni–Ti thin films of various compositions were sputtered-deposited on silicon substrates. Their mechanical properties (hardness and Young's modulus) were then determined using a nanoindenter equipped with a Berkovich tip. This paper examines the effects of composition on the mechanical properties (hardness and Young's modulus) of the sputter deposited Ni–Ti thin films. This is of particular interest since the actuation properties of these shape memory alloy films are compositionally sensitive. The surface-induced deformation is revealed via Atomic Force Microscopy (AFM) images of the indented surfaces. Which show evidence of material pile-up that increases with increasing load. The measured Young's moduli are also shown to provide qualitative measures of the extent of stress-induced phase transformation in small volumes of Ni–Ti films.