Publication | Closed Access
Study of the effect of H implantation and annealing on LiTaO3 surface blistering
14
Citations
24
References
2014
Year
Materials EngineeringH ImplantationMaterials ScienceSurface CharacterizationEngineeringIon ImplantationLitao3 Surface BlisteringSurface ScienceApplied PhysicsSurface TreatmentSurface Processing
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