Concepedia
Materials Science and Engineering A · 1989 · 41 citations · 6 references
Natural SciencesMaterials EngineeringMaterials ScienceComputational Materials ScienceImplant MaterialsImplant TechnologyIon ImplantationImplantation Profile ModelingImplantation-induced Defect FormationIon Implantation EffectsIon Implantation Simulation
6
A Monte Carlo computer program for the transport of energetic ions in amorphous targets
J.P. Biersack, L.G. Haggmark · Nuclear Instruments and Methods · 1980 · 4.7K citations
Engineering, Materials Science, Physics +16
Energy dependence of the ion-induced sputtering yields of monatomic solids
N. Matsunami, Yasunori Yamamura, Yukikazu Itikawa et al. · Atomic Data and Nuclear Data Tables · 1984 · 801 citations
Natural Sciences, Materials Science, Physics +7
Three-dimensional distributions of ion range and damage including recoil transport
J.P. Biersack · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 81 citations
Natural Sciences, Nuclear Engineering, Physics +14
Modeling of concentration profiles from very high dose ion implantation
S.N. Bunker, A.J. Armini · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1989 · 55 citations
Engineering, Nuclear Engineering, Radiation Transport +6
Microscopic processes accompanying A1+-ion implantation of nickel
Munir Ahmed, D.I. Potter · Acta Metallurgica · 1985 · 26 citations
Natural Sciences, Materials Engineering, Materials Science +10