Dynamic Mechanical Analysis (DMA) of CMP pad materials - Concepedia

Concepedia

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Dynamic Mechanical Analysis (DMA) of CMP pad materials

11

Citations

1

References

2000

Year

Irene Li, Kersten M. Forsthoefel, Kathleen Richardson, Yaw S. Obeng, William Easter, A. Maury

MRS Proceedings

Materials ScienceEngineeringMicromechanicsMechanical BehaviorMechanical EngineeringCmp Pad MaterialsSolid MechanicsMechanical DeformationMechanics Of Materials

References

	Year	Citations

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