Sputtering—Surface changes induced by ion bombardment

Growth and Perfection of Crystals.

John E. Vance · Journal of the American Chemical Society · 1959 · 1.4K citations

Natural Sciences, Chemistry, Materials Science +10

Ion Bombardment of Solids

L. N. Large · Electronics and Power · 1968 · 574 citations

Natural Sciences, Chemistry, Physics +9

A mechanism of surface micro-roughening by ion bombardment

Peter Sigmund · Journal of Materials Science · 1973 · 567 citations

Engineering, Materials Science, Physics +14

Growth and perfection of crystals

W. van Emde Boas · Journal of Physics and Chemistry of Solids · 1959 · 440 citations

Natural Sciences, Materials Engineering, Materials Science +10

Collection and sputtering experiments with noble gas ions

O. Almén, G. Bruce · Nuclear Instruments and Methods · 1961 · 417 citations

Natural Sciences, Materials Science, Physics +7