Publication | Closed Access
The early stages of oxygen adsorption on silicon surfaces as seen by electron spectroscopy
78
Citations
14
References
1979
Year
EngineeringEarly StagesSurface ChemistryElectron SpectroscopySurface AnalysisSurface ScienceApplied PhysicsChemisorptionPhysical ChemistryAdsorptionChemistryHydrogenSilicon SurfacesSilicon On Insulator
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