Growth Process of ZSM-5 Zeolite Film

Abstract

Abstract The growth process of a ZSM-5 zeolite film was studied using EDX-SEM, TEM, and EDX-STEM. It became clear that the ZSM-5 zeolite film was formed through a successive accumulation of zeolite crystals of 5 to 10 μm size. It was also found that the crystalline embryos with high Al concentration existed in the vicinity of the inner side of the zeolite film and within the film.