Numerical results for the Ar and CF4 mixture gas in a dual frequency capacitively coupled plasma using a hybrid model

Abstract

A one dimensional hybrid model has been proposed to study the Ar and CF4 mixture gas in a dual-frequency (DF) capacitively coupled plasma. To achieve the more precise spatiotemporal distributions of the electric field and ions flux, the ion momentum equations are adopted instead of the drift-diffusion model with the effective electric field approximation. By adjusting DF sources, the evolutions of ions densities, ion energy distributions, and ion angular distributions are obtained and the modulation effects are discussed. Finally, the comparison between the simulation and experimental result shows that the hybrid model could qualitatively describe the characteristic of the mixtures in less time, which will be more promising in two dimensional and three dimensional simulations.