Spectral tuning of ArF and KrF discharge lasers

Abstract

Simple prism tuning of a well-passivated double-discharge excimer laser has resulted in tuning ranges of better than 20 Å in both ArF and KrF. Neither tuning is continuous, being interrupted by nonlasing holes in regions of self-absorption. A two-prism dispersive chain results in a linewidth of 1–2 Å for KrF and less than 0.5 Å for ArF.