Synthesis of carbon-nitride films using a fast-switched dual-source low energy ion beam deposition system - Concepedia

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Synthesis of carbon-nitride films using a fast-switched dual-source low energy ion beam deposition system

41

Citations

15

References

1994

Year

D. Marton, A. Al-Bayati, S. S. Todorov, Kevin J. Boyd, J.W. Rabalai

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Materials ScienceEngineeringApplied PhysicsIon BeamVacuum DeviceCarbon-nitride FilmsChemical DepositionChemical Vapor Deposition

References

	Year	Citations

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