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Influence of Si content on structure and mechanical properties of TiAlSiN coatings deposited by multi-plasma immersion ion implantation and deposition

Materials ScienceIon ImplantationEngineeringMechanical PropertiesCorrosionSurface ScienceApplied PhysicsChemical Vapor DepositionMulti-functional CoatingPlasma ProcessingSi ContentTialsin Coatings